JPH02131336U - - Google Patents
Info
- Publication number
- JPH02131336U JPH02131336U JP3986389U JP3986389U JPH02131336U JP H02131336 U JPH02131336 U JP H02131336U JP 3986389 U JP3986389 U JP 3986389U JP 3986389 U JP3986389 U JP 3986389U JP H02131336 U JPH02131336 U JP H02131336U
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- compound
- discharge port
- compound semiconductor
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 150000001875 compounds Chemical class 0.000 claims 6
- 239000004065 semiconductor Substances 0.000 claims 5
- 238000000407 epitaxy Methods 0.000 claims 1
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 238000005507 spraying Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3986389U JPH0648829Y2 (ja) | 1989-04-03 | 1989-04-03 | 化合物半導体真空気相成長装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3986389U JPH0648829Y2 (ja) | 1989-04-03 | 1989-04-03 | 化合物半導体真空気相成長装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02131336U true JPH02131336U (en]) | 1990-10-31 |
| JPH0648829Y2 JPH0648829Y2 (ja) | 1994-12-12 |
Family
ID=31549143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3986389U Expired - Fee Related JPH0648829Y2 (ja) | 1989-04-03 | 1989-04-03 | 化合物半導体真空気相成長装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0648829Y2 (en]) |
-
1989
- 1989-04-03 JP JP3986389U patent/JPH0648829Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0648829Y2 (ja) | 1994-12-12 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |